Снос зданий:
ecosnos.ru
Главная  Пьезорезистивные чувствительные элементы 

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 [ 53 ] 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86

Окончание таблицы 4.4.

I W -о

>5

Л

о о

г

е е

Ж о

Описание устройства

Индуктивность

Макс имал ьная добротность

Частота

Примечание

Планарная микроспираль опи-раюик1яся на мембрану

12нГн

7ГГц

Ribas et al, 2000

Само собирающийся микроиндуктор

0,67-0,82 нГн

15 ГГц

Lubecke et al, 2000

Спиральные индукторы по КМОП технологии, подвешенные в воздухе

9нГн

5,88

1,5 ГГц

Lee et al, 2000

Спираль на кремнии с удельным сопротивлением 10 Ом см с 4.5 мкм слоем оксида

8нГн

2 ГГц

Физическая модель

Yue, Wong, 2000

Микроспираль с вытравленными 20 мкм углублениями

1,8 нГн

20,2

2-40 ГГц

Lu et al, 2000

3D индуктор с воздушным сердечником и защитным полимером

1,6-1,8 мкГн

0,01-

10 МГц

Форма колокола

Chomanwang, Lee, 2001

Медный меандр с использованием технологии самосборки

1,5-2,5 нГн

0,5-3 ГГц

Dahlmann, Yeatman, 2000

Микросоленоид с 6 витками по КМОП 0.24 мкм технологии

2,6 нГн

4,5 ГГц

Chen et al, 2001

Спираль на GaAs подложке из 9 мкм металла на 10 мкм слое полиимида

0,3-4,5 нГн

41,5

> 40 ГГц

Bahl, 2001

Примечание: Цг - относительная магнитная проницаемость, Q - добротность, L - индуктивность

Таблица 4.5. Эволюция .микроконденсаторов

Описание устройства*

Емкость, пФ

Максимальная Добротность

Частота, ГГц

Примечание

Переменное микроустройство позиционировния

0,035-0,1

80-200 В

Larson et al, 1991

Переменный микроконденсатор с электростатическим приводом

2,11

Параллельные емкости

Young, Boser, 1996

Гребенчатый микроконденсатор

5,19

200%

Yao, Park, DeNatale, 1998

Двухпластинный и трехплас-тинный микроконденсатор

4,0-4,4 2,05 1,9

0-0,8 В

Dec, Suyama, 1998a, 1998b

Гребенчатый конденсатор на ферроэлектрической тонкой пленке

0,05-20

3,4 : 1, 1-40 В

Kirchoefer et al, 1998

Электротермичекий переменный микроконденсатор

Wu et al, 1998

МДМ-конденсатор

на подвешенной мембране

2,6 0,1

100 300

Регулируемый

Sun, Tauritz, Baets, 1999 Feng et al, 2000a

Микроконденсатор, изготовленный методом перевернутого кристалла

100 1050

10 1

Harsh et al, 2000

Переменный микроконденсатор с интегрированным PZT приводом

3,1 : 1; 0-6 В

Park et al, 2001

л

л




Глава 4- Конденсаторы и катушки индуктивности

т

о

т а % S

а

е

и

а

о

N 1м

а, и

ч

У

I Ё

S D. В

о

=18 о

о н

s а

о

- о, а, а,

О) ш е

е -е- В

Литература 329


Литература

Ahn, С.Н., Allen, M.G., 1993, А fully integrated surface mieromaehined microactuator with a multilevel meander magnetic core , Journal of Microelectromechanieal Systems 2(1): 15~22.

Ahn, C.H., Allen, M.G., 1993, A planar mieromaehined spiral inductor for integrated magnetic microactuator applicationso. Journal of Micromechanics and Microengineering 3: 37-44.

Ahn, C.H., Allen, M.G., 1994, A new toroidal-meander type integrated inductor with

a multilevel meander magnetic core , IEEE Transactions on Magnetics 30(1): 73-79. Ahn, C.H., Allen, M.G., 1998, ((Mieromaehined planar inductors on silicon wafers for

MEMS appUcationss, IEEE Transactions on Industrial Electronics 45(6); 866-876. Ashby. K.B., KouUias, I.A., Finley, W.C., Bastek, J.J., Moinian, S., 1996, High

Qinductors for wireless applications in a complementary silicon bipolar process*,

IEEE Journal of Solid State Circuits 31(1): 4-9. Bahl, I.J., Bhartia, P., 1998, Microwave Solid-state Circuit Design, John Wiley, New

York.

Bahl, I.J., 1999, ((Improved quality factor spiral inductors on GaAs substrates*, IEEE Microwave and Guided Wave Letters 9(10): 398-400.

Bahl, I.J., 2001, ((High performance inductors*, IEEE Transactions on Microwave Theory and Techniques 49(4): 654-664.

Burghartz, J.N., Soyeur. M., Jenkins. K.A., Hulvey. M.D., 1995. High Q inductors in standard silicon interconnect technology and its application to an integrated RF power amphfier*, in Proceedings of lEDM 95, IEEE, Washington, DC: 1015-1017.

Burghartz, J.N., Soyuer. M., Jenkins. K.A., 1996. ((Microwave inductors and capacitors in standard multilevel interconnect silicon technology*, IEEE Transactions on Microwave Theory and Techniques 44(1): 100-104.

Burghartz, J.N., Edelstein. D.C., Jenkins, K.A., Kwark, Y.H., 1997, ((Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates*, IEEE Transactions on Microwave Theory and Techniques 45(10): 1961-1968.

Burghartz., J.N., Edelstein. D.C., Soyuer, M., Ainspan, H.A., Jenkins, K.A., 1998, RF circuit design aspects of spiral inductors on silicon*, IEEE Journal of Solid-state Circuits 33(12): 2028-2034.

Cahana, D., 1983, А new transmission line approach for designing spiral microstrip inductors for microwave integrated circuits*, in Proceedings of IEEE MTT-S Symposium, 1983, IEEE, Washington, DC: 245-247.

Case, M., 1997, ((SiGe MMlCs and flip-chip MICs for low cost microwave systems . Microwave Journal 40: 264-276.

Chang, J.Y.-C, Abidi, A. A., Gaitan, M., 1993. eLarge suspended inductors on silicon and their use in a 2fim CMOS RF amphfier*, IEEE Electron Device Letters 14(5): 246-248.

Chen, E.Y., Yoon, Y.K., Laskar, J., Allen, M.G., 2001, А 2.4 GHz integrated CMOS power amplifier with mieromaehined inductors*, in Proceedings of IEEE MTTS Symposium 2001, IEEE, Washington, DC: Vol. 1. pp. 523-526.

Chi, C.-Y., Rebeiz, G.M., 1994, Planar milhmeter wave microstrip, lumped elements using micro-machining techniques*, in Proceedings of IEEE MTT-S Symposium, IEEE, Washington, DC: 657-660.




Chi, C.-Y., Rebeiz, G.M., 1995, Planar microwave and miUimeter wave lumped elements and coupled line filters using micromachining technique*, Transactions on IEEE Microwave Theory and Techniques 43(4): 730-738.

Chi, C.-Y., Rebeiz, G.M., 1997, ((Design of Lange-couplers and single sideband mixers using micro-machining techniques*, IEEE Transactions on Microwave Theory and Techniques 45: 291-294.

Chomnawang, N., Lee, J.-B., 2001, Оп-сЫр 3D air core micro-inductor for high frequency applications using deformation of sacrificial polymer*. Proceedings of SPIE Smart Electronics and MEMS 4334: 54-62.

Dahlmann, G.W., Yeatman, E.M., 2000, eHigh Qmicrowave inductors on silicon by surface tension self-assembly*. Electronics Letters 36(20): 1707-1708.

Dec, A., Suyama, K., 1997, ((RF micromachined varactors with wide tuning range*, Electronics Letters 33(11): 922-924.

Dec, A., Suyama, K., 1998a, ((RF micromachined varactors with wide tuning range*, in Proceedings of IEEE Radio Frequency Integrated Circuit Symposium, IEEE, Washington. DC: 309-312.

Dec, A., Suyama, K., 1998b, ((Micromachined electro-mechanically tunable capacitors and their applications to RF ICs*, IEEE Transactions on Microwave Theory and Techniques 46(12): 2587-2596.

Dec, A., Suyama, K., 2000, ((Microwave MEMS-based voltage controlled oscillators*, IEEE Transactions on Microwave Theory and Techniques 48(11): 1943-1949.

Driesen, J., Ruythooren, W., Belmans, R., DeBoeck, J., Cells, J.-P., Hameyer. K., 1999, ((Electric and magnetic FEM modeling strategies for microinductors*, IEEE Transactions on Magnetics 35(5): 3577-3579.

Fan, L., Chen, R.T., Nespola, A., Wu, M.C., 1998, (.Universal MEMS platforms for passive RF components: suspended inductors and variable capacitors*, in Proceedings of 11th Annual International Workshop on MEMS 98, IEEE, Washington, DC: 29-33.

Feng, Z., Zhang, W., Su, В., Harsh, K.F., Gupta КХГ., Bright, V.M., Lee. Y.C, 2000a. ((Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators*, in Proceedings of 1999 IEEE MTT-S Symposium, IEEE, Washington, DC: 1507-1510.

Feng, Z., Zhang, H., Zhang, W., Su, В., Gupta, K.C., Bright, V.M., Lee, Y.C, 2000b. ((MEMS based variable capacitors for millimeter wave applications*, in Proceedings of Solid-state Sensors and Actuators Workshop, South Carolina, June 2000, IEEE, Washington, DC: 255-258.

Feng, Z., Zhang, H., Gupta, K.C., Zhang, W., Bright, V.M., Lee, Y.C, 2001. ((MEMS-based series and shunt variable capacitors for microwave and millimeter-wave frequencies*. Sensors and Actuators A: Physical 91: 256-265.

Greenhouse, H.M., 1974, (.Design of planar rectangular microelectronic inductors*, IEEE Transactions on Parts, Hybrids and Packaging 10(2): 101-109.

Grover, F.W., 1946, Inductance Calculations, Van Nostrand, New York.

Guckel, H., Skrobis, K., 1992, (.Metal micromechanisms via deep X-ray lithography, electroplating and assembly*, Journal of Micromechanics and Microengineering 2(4): 225-228.

Harsh, K.F., Zhang, W., Bright, V.M., Lee, Y.B., 1999, ЕНр-сЫр assembly for Si-based RF MEMS*, in Proceedings of 20th IEEE International Symposium on Microelectromechanical Systems, IEEE, Washington, DC: 273-278.

Harsh, K.F., Su, В., Zhang, W., Bright, V.M., Lee, Y.C, 2000, (.The realization and design considerations of flip-chip integrated MEMS tunable capacitor*. Sensors and Actuators A: Physical 80: 108-118.

Hjort, K., Solderkvist, J., Schweitz, J.-A., 1994, (.Gallium arsenide as a mechanical material*. Journal of Micromechanics and Microengineering 4: 1-13.

Hoivik, N., Michalicek, M.A., Lee, Y.C, Gupta, K.C., Bright, V.M., 2001, ((Digitally controllable variable high-Q MEMS capacitor for RF applications*, in Proceedings of IEEE MTT-S Symposium, May 2001, Volume 3, IEEE, Washington, DC: 2115-2118.

Johnson, R.A., Chang, C.E., Asbeck, P.M., Wood, M.E., Garcia, G.A., Lagnado. I., 1996, (.Comparison of microwave inductors fabricated on silicon-on-sapphire and bulk silicon*, IEEE Microwave and Guided Wave Letters 6(9): 323-325.

Jose, K.A., Yoon, H., Vinoy, K.J., Sharma, P., Varadan, V.K., Varadan, V.V., 2001, ((Low voltage tunable capacitors for RF MEM filters and antenna applications*, in Proceedings of IEEE Antennae and Propagation Society International Symposium, July 2001, Boston MA, IEEE, Washington, DC: 670-673.

Jung, S., Kang, K., Park. J.Y., Chung, K.W., Kim, Y.K., Kwon, Y., 2001, (.Micromachined frequency variable impedance tuners using resonant unit cell*, in Proceedings of IEEE MTT-S Symposium, May 2001, Volume 1, IEEE, Washington, DC: 333-336.

Kawahito, S., Sasaki, Y., Ashiki, M., Nakamura, Т., 1991, (.Micromachined solenoid for high sensitive magnetic sensors*, in Proceedings of Transducers 1991: IEEE, Piscataway, NJ, USA: 1077-1080.

Kim, Y.J., Allen, M.G., 1998, (.Surface micromachined solenoid inductors for high frequency appHcations*, IEEE Transactions on Components, Packaging and Manufacturing Technology, Part С 21(1): 26-33.

Kirchoefer, S.W., Pond, J.M., Carter, A.C, Change, W., Agarwal, K.K., Horwitz, J.S., Chrisey, D.B., 1998, (.Microwave properties of SrosBaosTiCh thin film inter-digitated capacitors*. Microwave and Optical Technology Letters 18(3): 168-171.

Konishi, Y., (Ed.).1991, Microwave Integrated Circuits, Marcel Dekker, New York.

Koutsoyannopoulos, Y.K., Papananos, Y., 2000, (.Systematic analysis and modehng of integrated inductors and transformers in RF 1С design*, IEEE Transactions on Circuits and Systems II 47(8): 699-713.

Laney, D.C, Larson, L.E., Malinowski, J., Harame, D., Subbanna, S., Volant, R., Case, M., Chan, P., 1998, Low-loss microwave transmission lines and inductors implemented in a Si/SiGe HBT process*, in Proceedings of IEEE BCTM 1998, IEEE, Washington, DC: 101-104.

Lang, K.L., Papapolymerou, J., Goldsmith, C.L., Malezewski, A., Kleber, J., 2001, А reconfig-urable double-stub tuner using MEMS devices*, in Proceedings of IEEE MTT-S Symposium, May 2001, Volume 1, IEEE, Washington, DC: 337-340.

Larson, L.E., Hackett, R.H., Lelendes, M.A., Lohr, R.S., 1991, (.Micromachined microwave actuator (MIMAC) technology - a new tuning approach for microwave integrated circuits*, in Proceedings of IEEE Microwave and Millimeter Wave Monolithic Circuits Symposium, IEEE, Washington, DC: 27-30.

Lee, C.-Y., Kao, Y.-H., Luo, J.-Y., Chang, K.-M., 2000, ((The enhanced Q spiral inductors with MEMS technology for RF applications*, in Proceedings of Asia Pacific Microwave Conference IEEE, Piscataway, NJ, USA; 2000: 1326-1329.



1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 [ 53 ] 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86